Work

Silicon Germanium Epitaxy: A New Material for MEMS

Year: 2000

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-657-ee7.4

Authors: J.T. Borenstein, N.D. Gerrish, R. White, M.T. Currie, E.A. Fitzgerald

Institutions: Draper Laboratory, Massachusetts Institute of Technology, AmberWave (United States), University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2156140547

FWCI: 0.432

Cites: 8

Cited by: 4

Related to: 10