Work

BCB Based Packaging for Low Actuation Voltage RF MEMS Devices

Year: 2006

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-0969-w05-06

Authors: David Peyrou, Fabienne PENNEC, Hikmat Achkar, Patrick PONS, Fabio Coccetti, Hervé Aubert, Robert Plana

Institutions: Centre National de la Recherche Scientifique, Laboratoire d'Analyse et d'Architecture des Systèmes

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2157065716

FWCI:

Cites: 6

Cited by: 1

Related to: 10