Work

Fabrication of Transmission Color Filters Using Silicon Subwavelength Gratings on Quartz Substrates

Year: 2006

Type: article

Abstract: We investigate theoretically and experimentally transmission color filters using silicon subwavelength gratings on quartz substrates. Each grating area is 120 mum-square, which is suitable pixel size for displays and multichannel detectors. In the fabrication, electron beam lithography and fast atom beam etching are used. The grating periods are 400, 350, and 440 nm for the red, green, and blue filters, respectively. The transmission spectrum obtained from a coupling between an incident light and the submicrometer periodic grating matches with human color perception. The transmittances of 71.1%, 58.1%, and 59.3% are obtained for the red, green, and blue filters, respectively

Source: IEEE Photonics Technology Letters

DOI: 10.1109/lpt.2006.883208

Authors: Y. Kanamori, M. Shimono, K. Hane

Institution: Tohoku University

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2157093292

FWCI: 3.144

Cites: 15

Cited by: 182

Related to: 10