Work

A nanoparticle-based microsensor for room temperature hydrogen detection

Year: 2006
Type: conference-paper
Abstract: In this work, we report a novel micromachined hydrogen sensor operating at room temperature. The sensor has been successfully designed and fabricated, based on interdigitated conductometric microelectrodes integrating indium oxide (In/sub 2/O/sub 3/)-doped tin oxide (SnO/sub 2/) semiconductor nanocrystalline particles with platinum (Pt) nanoclusters. Very high H/sub 2/ sensitivity (110/spl times/10/sup 3/) with fast response and recovery has been observed for the presented sensor at room temperature and low hydrogen gas concentration. The nanomaterial/microdevice integration for a highly efficient sensor device with unprecedented functions has been explored and investigated systematically.
Language: English
Open Access status: green
OpenAlex ID: W2157276589
FWCI: 0.53
Cites: 17
Cited by: 3
Related to: 10