Work

Quality factors of MEMS gyros and the role of thermoelastic damping

Year: 2003

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2002.984242

Authors: A. Duwel, M. Weinstein, J. Gorman, J. Borenstein, P. Ward

Institutions: Draper Laboratory, Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2159407649

FWCI: 3.891

Cites: 15

Cited by: 41

Related to: 10