Work

Invar-36 Micro Hemispherical Shell Resonators

Year: 2014

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2014.6765568

Authors: Nishanth Mehanathan, Vahid Tavassoli, Peng Shao, Logan Sorenson, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Northrop Grumman, Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2159490302

FWCI: 5.27

Cites: 8

Cited by: 25

Related to: 10