Real-time control of multiproduct bulk-service semiconductor manufacturing processes
Year: 1992
Type: article
DOI: 10.1109/66.136278
Authors: J.W. Fowler, D.T. Phillips, G.L. Hogg
Institution: Texas A&M University
Language: English
Subfield: Management Information Systems
Domain: Social Sciences
Open Access status: closed
OpenAlex ID: W2159602768
