Work

High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes

Year: 2002

Type: conference-paper

Source: IEEE/ION Position Location and Navigation Symposium

DOI: 10.1109/plans.2000.838318

Authors: F. Ayazi, K. Najafi

Institutions: Georgia Institute of Technology, University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2159659616

FWCI: 1.422

Cites: 5

Cited by: 15

Related to: 10