Work

Development of Parallel Dip Pen Nanolithography Probe Arrays for High Throughput Nanolithography

Year: 2002

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-758-ll4.2

Authors: David A. Bullen, Xuefeng Wang, Jun Zou, Sung-Wook Chung, Chang Liu, Chad A. Mirkin

Institutions: University of Illinois Urbana-Champaign, Northwestern University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Defense Advanced Research Projects Agency, Air Force Office of Scientific Research

OpenAlex ID: W2159844532

FWCI: 2.012

Cites: 24

Cited by: 9

Related to: 10