Fabrication of MEMS ZnO dome-shaped-diaphragm transducers for high-frequency ultrasonic imaging
Year: 2005
Type: article
Authors: Guo-Hua Feng, Charles C Sharp, Q F Zhou, Wei Pang, Eun Sok Kim, K K Shung
Institution: University of Southern California
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Institutes of Health
OpenAlex ID: W2159973952