Work

Flexible, dry-released process for aluminum electrostatic actuators

Year: 1994

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/84.311558

Authors: C.W. Storment, D.A. Borkholder, V. Westerlind, J.W. Suh, N.I. Maluf, G.T.A. Kovacs

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2160501410

FWCI: 4.702

Cites: 11

Cited by: 58

Related to: 10