Work

Simultaneous dual-mode excitation of piezo-on-silicon micromechanical oscillator for self-temperature sensing

Year: 2011

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2011.5734468

Authors: M.J. Dalal, J.L. Fu, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2160503630

FWCI: 4.058

Cites: 2

Cited by: 10

Related to: 10