Work

In-situ prediction of RIE time to completion using neural networks

Year: 2002

Type: conference-paper

Source: IEEE/CPMT International Electronics Manufacturing Technology Symposium

DOI: 10.1109/iemt.1994.404725

Authors: D. Baker, C.D. Himmel, G.S. May

Institution: Georgia Institute of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2160543068

FWCI:

Cites: 11

Cited by: 1

Related to: 10