Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control
Year: 2008
Type: article
Authors: Chek-Sing Teo, Kok-Kiong Tan, Ser-Yong Lim
Institution: National University of Singapore
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2160884894