Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates
Year: 2014
Type: article
Source: Nanoscale
DOI: 10.1039/c4nr03070b
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2161258082
