Work

Atomic-Scale Templates Patterned by Ultrahigh Vacuum Scanning Tunneling Microscopy on Silicon

Year: 2008

Type: review

Source: Annual Review of Physical Chemistry

DOI: 10.1146/annurev.physchem.040808.090314

Authors: Michael A. Walsh, Mark C. Hersam

Institution: Northwestern University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2161672655

FWCI: 0.565

Cites: 136

Cited by: 79

Related to: 10