Work

Scanning stage technology for exposure tools

Year: 1999

Type: article

Source: TU/e Research Portal

Authors: Hans Butler, R Thoma George, Jja Jochem Baselmans

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2161719309

FWCI:

Cites:

Cited by: 4

Related to: 10