Work

Single- and Triaxis Piezoelectric-Bimorph Accelerometers

Year: 2008

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2007.909100

Authors: Qiang Zou, Wei Tan, Eun Sok Kim, G.E. Loeb

Institutions: University of Southern California, Broadcom (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Institutes of Health

OpenAlex ID: W2161759256

FWCI: 6.276

Cites: 20

Cited by: 84

Related to: 10