Work

Stochastic Analysis of Electrostatic MEMS Subjected to Parameter Variations

Year: 2009

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2009.2034612

Authors: Nitin Agarwal, Narayana R. Aluru

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Probabilistic and Robust Engineering Design

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

Funders: National Science Foundation, U.S. Department of Energy, Advanced Research Projects Agency

Award: Complex Nonlinear Dynamics in Electrostatic Microelectromechanical Systems (MEMS)

OpenAlex ID: W2162010030

FWCI: 2.901

Cites: 27

Cited by: 42

Related to: 10