Dual-mode piezo-on-silicon resonant temperature and humidity sensor for portable air quality monitoring systems
Year: 2010
Type: conference-paper
Authors: Jenna L Fu, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2162243665
