Work

PZT thin films for microsensors and actuators: Where do we stand?

Year: 2000

Type: article

Abstract: This paper reviews deposition, integration, and device fabrication of PbZr(x)Ti(1-x)O(3) (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/58.852073

Author: P. Muralt

Institution: École Polytechnique Fédérale de Lausanne

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2162372488

FWCI: 7.957

Cites: 111

Cited by: 385

Related to: 10