Coupling High Force Sensitivity and High Stiffness in Piezoresistive Cantilevers with Embedded Si-Nanowires
Year: 2007
Type: conference-paper
Authors: Kianoush Naeli, Oliver Brand
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2162405390