Oxidation-Induced Defects and Effects in Silicon During Low Thermal-Budget Processing
Year: 1988
Type: book-chapter
Source: Springer eBooks
Author: Richard B. Fair
Institutions: Duke University, MCNC Research and Development Institute
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2162706758