Work

Parylene to silicon adhesion enhancement

Year: 2009

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2009.5285963

Authors: R. Huang, Y.C. Tai

Institution: California Institute of Technology

Language: English

Topic: Neuroscience and Neural Engineering

Subfield: Cellular and Molecular Neuroscience

Field: Neuroscience

Domain: Life Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2162738176

FWCI: 3.209

Cites: 13

Cited by: 27

Related to: 10