Work

High-speed microfabricated silicon turbomachinery and fluid film bearings

Year: 2005

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2004.839008

Authors: L.G. Frechette, S.A. Jacobson, K.S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, Chee Wei Wong, Xin Zhang, M.A. Schmidt, A.H. Epstein

Institutions: Université de Sherbrooke, Massachusetts Institute of Technology, Brown University, University of Maryland, College Park, Boston University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2163728886

FWCI: 13.35

Cites: 33

Cited by: 142

Related to: 10