Growth, dielectric properties, and memory device applications of ZrO2 thin films
Year: 2013
Type: article
Source: Thin Solid Films
Authors: Debashis Panda, Tseung-Yuen Tseng
Institution: National Yang Ming Chiao Tung University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
Awards: G2546152992, G7585942692
OpenAlex ID: W2163761283