Work

Resist materials for proton micromachining

Year: 1999

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(99)00392-4

Authors: J.A. van Kan, J.L. Sanchez, B. Xu, T. Osipowicz, F. Watt

Institutions: National University of Singapore, Institute of Microelectronics

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2163933515

FWCI: 4.882

Cites: 14

Cited by: 57

Related to: 10