Work

Analysis of Magnetic Field and Discharge Plasma for HTS Magnetron Sputtering Apparatus

Year: 2010

Type: article

Source: IEEE Transactions on Applied Superconductivity

DOI: 10.1109/tasc.2010.2044567

Authors: Qingquan Qiu, Liye Xiao, Tianbin Huang, Guomin Zhang, Xiaohang Li

Institutions: Chinese Academy of Sciences, Institute of Electrical Engineering

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2164677271

FWCI:

Cites: 11

Cited by: 1

Related to: 10