Work

Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness

Year: 1989

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/66.24929

Authors: R.L. Guldi, C.D. Jenkins, G.M. Oamminga, T.A. Baum, T.A. Foster

Institution: Texas Instruments (United States)

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W2164817352

FWCI: 0.978

Cites: 1

Cited by: 19

Related to: 10