Work

High $Q$-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment

Year: 2008

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2008.916328

Authors: Jae Hyeong Seo, O. Brand

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2165000018

FWCI: 14.67

Cites: 23

Cited by: 147

Related to: 10