Work

Electromechanical Model of Electrically Actuated Narrow Microbeams

Year: 2006

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2006.880204

Authors: R.C. Batra, M. Porfiri, D. Spinello

Institution: Virginia Tech

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2165174278

FWCI: 9.106

Cites: 35

Cited by: 201

Related to: 10