Work

Indium Phosphide MEMS Cantilever Resonator Sensors Utilizing a Pentacene Absorption Layer

Year: 2008

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2008.2008600

Authors: N. Siwak, Xiao Zhu Fan, D. Hines, S. Kanakaraju, N. Goldsman, R. Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2165291622

FWCI: 2.39

Cites: 40

Cited by: 12

Related to: 10