Work

Imaging and reliability of capacitive RF MEMS switches in III-V technology

Year: 2013

Type: conference-paper

Source: Padua Research Archive (University of Padova)

Authors: Anna Persano, Augusto Tazzoli, F. Quaranta, Gaudenzio Meneghesso, Pietro Siciliano, A. Cola

Institution: University of Padua

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2166033068

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Cites: 7

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Related to: 20