Postfabrication Electrical Trimming of Silicon Micromechanical Resonators via Joule Heating
Year: 2011
Type: article
Authors: Ashwin K. Samarao, Farrokh Ayazi
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2166460189