Work

Process compensated micromechanical resonators

Year: 2007

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2007.4432960

Authors: Gavin K. Ho, John K. C. Perng, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2166554203

FWCI: 1.507

Cites: 9

Cited by: 7

Related to: 10