Work

Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Year: 2014

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2014.2330590

Authors: Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Brian J. Lee, Ian Flader, Thomas W. Kenny

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung

OpenAlex ID: W2167030158

FWCI: 5.136

Cites: 37

Cited by: 138

Related to: 10