Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β‐Ta 2 O 5
Year: 1995
Type: article
Authors: Yong W. Bae, Woo Y. Lee, David P. Stinton
Institutions: Oak Ridge National Laboratory, American Ceramic Society
Language: English
Subfield: Ceramics and Composites
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2167330401