Work

Kinetic and Thermodynamic Analyses of Chemical Vapor Deposition of Aluminum Nitride

Year: 1991

Type: article

Source: Journal of the American Ceramic Society

DOI: 10.1111/j.1151-2916.1991.tb07794.x

Authors: Woo Y. Lee, W. J. Lackey, P. K. Agrawal

Institutions: Georgia Institute of Technology, American Ceramic Society, Georgia Tech Research Institute

Language: English

Topic: Advanced ceramic materials synthesis

Subfield: Ceramics and Composites

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2168190196

FWCI: 3.403

Cites: 18

Cited by: 30

Related to: 10