Work

N-well based CMOS calorimetric chemical sensors

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2000.838497

Authors: N. Kerness, A. Koll, A. Schaufelbuhl, C. Hagleitner, A. Hierlemann, O. Brand, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Eidgenössische Technische Hochschule Zürich

OpenAlex ID: W2168344248

FWCI: 2.134

Cites: 11

Cited by: 14

Related to: 10