Work

Closed-loop control of a long-range micropositioner using integrated photodiode sensors

Year: 2009

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2009.02.020

Authors: Mustafa Ilker Beyaz, Matthew McCarthy, Nima Ghalichechian, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2169493397

FWCI: 2.111

Cites: 23

Cited by: 17

Related to: 10