Work

What can electron paramagnetic resonance tell us about the Si/SiO2 system?

Year: 1998

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.590301

Authors: P. M. Lenahan, J. F. Conley

Institution: Pennsylvania State University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2170109091

FWCI: 10.24

Cites: 65

Cited by: 352

Related to: 10