Work

Broadband capacitive micromachined ultrasonic transducers ranging from 10 kHz to 60 MHz for imaging arrays and more

Year: 2003

Type: conference-paper

Source: Proceedings/Proceedings - IEEE Ultrasonics Symposium

DOI: 10.1109/ultsym.2002.1192473

Authors: A.S. Ergun, Yongli Huang, C.-H. Cheng, O. Oralkan, J. Johnson, H. Jagannathan, U. Demirci, G.G. Yaralioglu, M. Karaman, B.T. Khuri-Yakub

Institution: Stanford University

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2170181806

FWCI: 19.26

Cites: 11

Cited by: 36

Related to: 10