Age-based double EWMA controller and its application to CMP processes
Year: 2001
Type: article
DOI: 10.1109/66.909650
Authors: A. Chen, Ruey-Shan Guo
Institution: National Taiwan University
Language: English
Subfield: Statistics, Probability and Uncertainty
Field: Decision Sciences
Domain: Social Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W2170909262