Work

High frequency XYZ-axis single-disk silicon gyroscope

Year: 2008

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2008.4443791

Authors: Houri Johari, Jalpa Shah, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2171159143

FWCI: 2.37

Cites: 5

Cited by: 14

Related to: 10