Work

A high-g low-voltage HARPSS tunable capacitor

Year: 2005

Type: conference-paper

Source: IEEE MTT-S International Microwave Symposium digest

DOI: 10.1109/mwsym.2005.1516720

Authors: P. Monajemi, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2171254142

FWCI: 2.199

Cites: 10

Cited by: 8

Related to: 10