Work

Evaluation Of Elastic Modulus And Stress Gradient Of PECVD Silicon Nitride Thin Films

Year: 2004

Type: conference-paper

Source: UWA Profiles and Research Repository (University of Western Australia)

Authors: Han Huang, K.J. Winchester, J. Antoszewski, Thuyen Nguyen, Mariusz Martyniuk, Byron Walmsley, Yinong Liu, Xiaozhi Hu, C.A. Musca, J.M. Dell, L. Faraone

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2171510121

FWCI: 1.661

Cites: 9

Cited by: 9

Related to: 10