Work

Multilayer Materials for Electrostatic Switches

Year: 2000

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-657-ee5.1

Authors: Mark A Phillips, Brennan L Peterson, Christine M Esber, Jesse Hwang, Bruce M Clemens

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2171523950

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