Work

Fabrication of MEMS Tonpilz Transducers

Year: 2001

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-687-b5.22

Authors: Q. F. Zhou, L.-P. Wang, G. Gerber, R. Meyer, D. Van Tol, S. Tadigadapa, W. J. Hughes, S. Trolier-McKinstry

Institutions: Pennsylvania State University, Applied Research Laboratory at Penn State

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Office of Naval Research

OpenAlex ID: W2172244759

FWCI:

Cites: 13

Cited by: 5

Related to: 10