Work

Mechanical Behavior of Thin Films

Year: 1996

Type: article

Source: Annual Review of Materials Science

DOI: 10.1146/annurev.matsci.26.1.431

Authors: R P Vinci, J J Vlassak

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Semiconductor Research Corporation

OpenAlex ID: W2174093151

FWCI: 9.989

Cites:

Cited by: 228

Related to: 10