Work

MEMS Inertial Sensors

Year: 2015

Type: other

Source: Advanced micro & nanosystems

DOI: 10.1002/9783527676330.ch14

Authors: Diego Emilio Serrano, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2177289779

Cites: 27

Cited by: 6

Related to: 10